Techniques for providing decoupling capacitance

ABSTRACT

Techniques for electronic device fabrication are provided. In one aspect, an electronic device is provided. The electronic device comprises at least one interposer structure having one or mole vias and a plurality of decoupling capacitors integrated therein, the at least one interposer structure being configured to allow for one or more of the plurality of decoupling capacitors to be selectively deactivated. In another aspect, a method of fabricating an electronic device comprising at least one interposer structure having one or more vias and a plurality of decoupling capacitors integrated therein comprises the following step. One or more of the plurality of decoupling capacitors are selectively deactivated.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.11/201,572, filed Aug. 11, 2005, which is incorporated herein byreference.

FIELD OF THE INVENTION

The present invention relates to electronic devices and, moreparticularly, to techniques for providing decoupling capacitance inelectronic devices.

BACKGROUND OF THE INVENTION

Many electronic devices use a number of separate integrated circuit (IC)chips. Typically, each IC chip is mounted individually in a separatepackage that is connected to a printed circuit board which providespower and signal interconnections to the IC chips. However, when adevice requires a large number of IC chips, individually packaging andmounting each chip greatly increases the area on the printed circuitboard required to interconnect all the chips. Additionally, as devicespeeds increase, it is more important to minimize the path lengthsbetween IC chips themselves, as well as between the IC chips and otherelectronic components connected to them.

To decrease printed circuit board space, distance between IC chips andcomplexity of interconnections, many devices now use multichip modules(MCMs) that incorporate a number of IC chips into one package.Integrating a number of IC chips into one package reduces the distancebetween IC chips, thus permitting greater device speeds. The MCMsusually provide power and signal interconnections to the individual ICchips from an underlying ceramic substrate.

MCMs may be two-dimensional, that is all the IC chips of a package aremounted on a planar substrate, or three-dimensional, where IC chips aremounted above or below a ceramic substrate, another IC chip, or aninterposer. An interposer is a structure on which various electroniccomponents and interconnections are formed and is usually locatedbetween an IC chip and a ceramic substrate, another interposer, or aprinted circuit board.

As the switching speed of devices increases, it is important to providea decoupling capacitors in close proximity to the IC chips of themultichip module. Decoupling capacitors serve as charge reservoirs tosupport instantaneous current surges that invariably accompanysimultaneous circuit switching. Conventionally, decoupling capacitorshave been incorporated into the ceramic substrate which increases thecomplexity of the ceramic substrate, thus decreasing production yields,as well as uses up space on the ceramic substrate, which is at apremium.

Further, during device production, it is inevitable that one or morecomponents of the device produced will be defective, which may increaseas components decrease in size. Devices containing a defective componentthen have to be discarded, or at the very least, the part(s) of thedevice containing the defective component has to be discarded. Forexample, if a ceramic substrate has one or more defective decouplingcapacitors, it has to be discarded. As such, production yields willsimilarly be decreased

Therefore, techniques for producing electronic devices that maximizeavailable space while maintaining proper path lengths between componentsand minimize the effects of defective components would be desirable.

SUMMARY OF THE INVENTION

Electronic devices and techniques for the fabrication thereof areprovided In one aspect of the invention, an electronic device isprovided. The electronic device comprises at least one interposerstructure having one or more vias and a plurality of decouplingcapacitors integrated therein, the at least one interposer structurebeing configured to allow for one or more of the plurality of decouplingcapacitors to be selectively deactivated.

In another aspect of the invention, a method of fabricating anelectronic device comprising at least one interposer structure havingone or more vias and a plurality of decoupling capacitors integratedtherein comprises the following step. One or more of the plurality ofdecoupling capacitors are selectively deactivated.

A more complete understanding of the present invention, as well asfurther features and advantages of the present invention, will beobtained by reference to the following detailed description anddrawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram illustrating a cross-sectional view of an exemplaryelectronic device comprising an interposer structure having a pluralityof capacitors integrated therein according to an embodiment of thepresent invention;

FIGS. 2A-C are diagrams illustrating cross-sectional views of exemplaryelectronic devices comprising interposer structures having differenttypes of decoupling capacitors integrated therein according to anembodiment of the present invention;

FIG. 3 is a diagram illustrating a cross-sectional view of an exemplaryelectronic device comprising multiple interposer structures each havinga plurality of capacitors integrated therein according to an embodimentof the present invention;

FIG. 4 is a diagram illustrating a cross-sectional view of an exemplaryelectronic device comprising an interposer structures having a pluralityof capacitors and active circuits integrated therein according to anembodiment of the present invention;

FIG. 5 is a diagram illustrating a cross-sectional view of an exemplaryelectronic device comprising an interposer structures having a pluralityof decoupling capacitors integrated therein as well as a plurality ofdiscrete capacitors associated therewith according to an embodiment ofthe present invention;

FIG. 6A is a diagram illustrating a cross-sectional view of an exemplaryelectronic device comprising an interposer structure having a pluralityof capacitors integrated therein, one or more of which is defectiveaccording to an embodiment of the present invention;

FIG. 6B is a diagram illustrating a top-down view of the exemplaryelectronic device shown in FIG. 6A comprising an interposer structurehaving a plurality of capacitors integrated therein, one or more ofwhich is defective according to an embodiment of the present invention;

FIG. 7 is a circuit diagram illustrating an exemplary electronic devicecomprising an interposer structure having a plurality of capacitorsintegrated therein according to an embodiment of the present invention;

FIG. 8 is a circuit diagram illustrating an exemplary electronic devicecomprising an interposer structure having a plurality of capacitorsintegrated therein which can be selectively deactivated according to anembodiment of the present invention;

FIG. 9 is a circuit diagram illustrating an exemplary electronic devicecomprising an interposer structure having a plurality of capacitorsintegrated therein which can be selectively eliminated according to anembodiment of the present invention; and

FIG. 10 is another circuit diagram illustrating an exemplary electronicdevice comprising an interposer structure having a plurality ofcapacitors integrated therein which can be selectively eliminatedaccording to an embodiment of the present invention

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

FIG. 1 is a diagram illustrating a cross-sectional view of exemplaryelectronic device 100 comprising an interposer structure having aplurality of capacitors integrated therein. Electronic device 100comprises integrated circuit (IC) chip 102 and interposer structure 103linked by a plurality of interconnections 104 Interconnections 104 maycomprise any suitable electrically conductive material, including, butnot limited to solder materials, such as lead-tin or tin-silver solder,copper, and combinations comprising at least one of the foregoingmaterials

Interposer structure 103 comprises a plurality of decoupling capacitors106 and vias 110. Decoupling capacitors 106, as shown in FIG. 1,comprise trench capacitors. However, as will be described in detailbelow, other suitable types of decoupling capacitors, such as parallelplate capacitors may used instead of or in addition to, trenchcapacitors.

As shown, for example, in expanded view 114, a trench decouplingcapacitor comprises a first electrode, e.g., first electrode 116, and asecond electrode, e.g., second electrode 120, separated by a dielectriclayer, e.g., dielectric layer 118. Techniques for fabricating adecoupling capacitor, including suitable materials for forming each ofthe first electrode, the second electrode and the dielectric layer willbe described in detail below

Vias 110 may comprise silicon vias that extend vertically through thethickness of interposer structure 103 (referred to hereinafter as“silicon through vias”). According to one exemplary embodiment, one ormole of vias 110 may comprise a conductive core surrounded by a liner,which is in turn surrounded by an insulator. Further, one or more ofvias 110 may comprise a conductive core surrounded by an insulator.Additionally, one or more of vias 110 may comprise substantially aconductive material. The vias can be made from (i) conductors, such asmetal conductors, including Cu, W, Ni, Pt, Ti, Ta, Co, Nb, Mo, V, Zr,Ir, Re, Rh or their alloys or W, Ti, Ta, Co nitrides and silicides; andwhere Cu and W metal conductors awe preferred, (ii) liner can be, forexample, TiN/Ti, TaN/Ta or alternate liner material that can provideadhesion between metal conductor and insulator and can provide adiffusion barrier during processing, and (iii) an insulator, such asSiO2, SiOx, SiN or an alternate electrical insulator. Another option forthe via may comprise an annular structure with a central insulator or asemiconductor, such as Si, insulator, liner, conductor, liner andinsulator as one describes a cross section from center to outside of viawhere materials such as those above can be utilized.

Interposer structure 103 further comprises adhesion and barrier layers108 which contain, for example, conductive wiring and insulating layers.Layers in 108 may be comprised of conductors, such as metals withfeatures such as vias, wires, electrodes and surface pads and fuses,where (i) conductors, such as metal conductors, including Al, Cu, W, Ni,Pt, Ti, Ta, Co, Nb, Mo, V, Zr, It, Re, Rh or their alloys or W, Ti, Ta,Co nitrides and silicides; and where Cu and Al metal conductors arepreferred, (ii) liner can be, for example, TiN/Ti, TaN/Ta or analternate liner material that can provide adhesion between metalconductor and insulator and can provide a diffusion barrier duringprocessing, and (iii) an insulator, such as SiO2, SiOx, SiN, Polyimide,Matrimide or a dielectric, such as HfO2, HfSiOx, Al2O3, BaTiO3 orcomposites therein or an alternate electrical insulator.

Electronic device 100 further comprises interconnections 112. Likeinterconnections 104, interconnections 112 may comprise any suitableelectrically conductive material, including, but not limited to soldermaterials, such as lead-tin or tin-silver, copper and combinationscomprising at least one of the foregoing materials. Interconnections 112may serve to connect IC chip 102, through interposer structure 103, to aceramic substrate, another interposer or a printed circuit board (notshown).

FIGS. 2A-C are diagrams illustrating cross-sectional views of exemplaryelectronic devices comprising interposer structures having differenttypes of decoupling capacitors integrated therein. In FIG. 2A,interposer structure 206 comprises a plurality of trench decouplingcapacitors 202.

As described, for example, in conjunction with the description of FIG.1, above, other types of decoupling capacitors, e.g., other than trenchdecoupling capacitors, may be used in accordance with the presentteachings. For example, as shown in FIG. 2B, a plurality of parallelplate decoupling capacitors 204 are used in interposer structure 208rather than trench decoupling capacitors. For parallel plate capacitors,an insulator or dielectric is used to separate two parallel electrodes.For purposes of structural integrity and processing, liners or adhesionlayers may be placed on either side of the electrodes and vias, wiles orconductors are connected to each side of the minimum of two electrodesthat can then provide current or voltage potential across theelectrodes. For parallel plate capacitors built on the surface of asilicon wafer, the metal electrode-insulator-metal electrode can bedeposited on the surface of an insulator on Silicon to form thecapacitor. First, (i) the electrode or conductors, such as metalconductors including Al, Cu, W, Ni, Pt, Ti, Ta, Co, Nb, Mo, V, Zr, If,Re, Rh or their alloys or W, Ti, Ta, Co nitrides and silicides could bedeposited as the bottom electrode, then (ii) a liner, such as TiN/Ti,TaN/Ta or an alternate liner material may be used if needed, then (iii)an insulator or dielectric, such as SiO2, SiOx, SiN, HfO2, HfSiOx,Al2O3, BaTiO3, barium zirconate titanate, barioum strontium titanate ordoped barium titanate modified with Pb, Nb, W, Ca, Mg and/or Zn may beutilized or an organic polymer such as polyimide or an alternateelectrical insulator, followed by (iv) deposition of the second liner ifneeded, and, then, (v) a second conductive electrode. Additional linerand insulator or insulator may provide an enclosure of the structureother than connections for electrical connection. The processes mayinclude deposition of a bottom electrode, such as a conductor.

As further described, for example, in conjunction with the descriptionof FIG. 1, above, multiple types of decoupling capacitors may beintegrated in the same interposer structure. As shown in FIG. 2C, aplurality of trench decoupling capacitors 202 and a plurality ofparallel plate decoupling capacitors 204 are integrated in the sameinterposer structure 210. While configurations are anticipated hereinwhere capacitors are grouped in blocks in the interposer structure, asshown in FIG. 2C, this configuration is not required, and configurationsare anticipated wherein the different types of decoupling capacitors arestaggered, e.g., alternating trench and parallel plate decouplingcapacitors. The organization of capacitors within the interposerstructure will be described in detail below.

The presence of trench decoupling capacitors is beneficial as dependingon design, they provide the greatest capacitance per unit area ofcapacitor, e.g., as compared to parallel plate decoupling capacitors.Depending on design with design of a low resistance metal electrode orsignificant doped electrode, the presence of parallel plate decouplingcapacitors is beneficial as they provide very low inductance for highfrequency IT applications where inductance values are often measured intenths to few pico-henry range and low RC delay constant such may be inthe few to tens of picosecond range and, as will be described in detailbelow, allow for the incorporation of high k dielectrics in thecapacitor. Therefore, depending on the needs of a particularapplication, the interposer structure supporting a combination of trenchand parallel plate decoupling capacitors may be employed.

Techniques for fabricating capacitors are described, for example, inU.S. Pat. No. 6,791,133 issued to Farooq et al., entitled “InterposerCapacitor Built on Silicon Wafer and Joined to a Ceramic Substrate” andin U.S. Patent Application No. 2004/0108587 filed by Chudzik et al.,entitled “High Density Chip Carrier With Integrated Passive Devices,”the disclosures of which are incorporated by reference herein

According to the techniques presented herein, a trench decouplingcapacitor, for example, may be formed in the interposer structure byfirst patterning a trench in the interposer structure then a metal,including, but not limited to, tungsten, titanium, tantalum, cobalt,their nitrides and silicides, zirconium, hafnium, silicon-germanium andcombinations comprising at least one of the foregoing metals, isdeposited in the trench using one or more of atomic layer deposition(ALD) and chemical vapor deposition (CVD) to form a first electrode,e.g., first electrode 116 of FIG. 1, described above

ALD, CVD or any another similar deposition technique(s) may then be usedto deposit a dielectric material forming a dielectric layer, e.g.,dielectric layer 118 of FIG. 1, described above. According to oneexemplary embodiment, the dielectric layer comprises a high k dielectricmaterial. Suitable high k dielectric materials, include, but are notlimited to, silicon nitride, silicon oxinitride, tantalum oxide,titanium oxide, aluminum oxide, zirconium oxide, hafnium oxide, hafniumsilicon oxide, barium strontium, barium strontium titanate, bariumzirconium titanate, barium titanium oxide, and combinations comprisingat least one of the foregoing materials.

In general, the use of a high k dielectric materials increases thecapacitance of a capacitor. According to one exemplary embodiment, acombination of a high k dielectric material(s) and low k dielectricmaterial(s) is used to achieve a desired level of capacitance. Suitablelow k dielectric materials, include, but are not limited to, low Kmaterials, such as SiO2, SiN and high K materials may include HfO2,HfSiOx, Al2O3, BaTiO3, barium zirconate titanate, barioum strontiumtitanate or doped barium titanate modified with Pb, Nb, W, Ca, Mg and/orZn. Depending on the size of the capacitance, application, processing,costs, voltage, breakdown voltage, a combination of high and low Kmaterials may be used for different dielectrics in the integratedcapacitor. A second electrode, e.g., second electrode 120 of FIG. 1,described above, is then formed by depositing a second electrodematerial into the trench Suitable materials for forming the secondelectrode include, but are not limited to tungsten, titanium, tantalum,copper, nickel, platinum, cobalt, niobium, molybdenum, vanadium,zirconium, iridium, rhenium, rhodium, alloys thereof and combinationscomprising at least one of the foregoing materials, and may be depositedusing one or more of ALD, CVD, plating and physical vapor deposition(PVD).

Alternatively, the second electrode may comprise polycrystalline siliconthat is doped, e.g., at its surface, so as to be conductive The first orsecond electrodes may utilize doped silicon or doped polysilicon whichenables them to be electrically conductive where dopants such as AS, Bor P may be implanted with concentrations such as 10⁻¹⁷ to 10⁻²¹atoms/cm² which would provide low resistivity of under 0.01 ohm-cm It isimportant to note that silicon or polycrystalline silicon can act aseither an insulator if oxidized or nitrided, a semiconductor with lowdopant concentration or conductor which high dopant level as given aboveif or a conductor, depending on the amount of doping and/or the contentof the dopant. Polycrystalline silicon, when acting as a conductor,however, does provide a level of resistance such as copper conductorswhich have 1.67×10⁻⁶ ohm-cm resistivity, which makes it unfavorable forsome high frequency applications. In these circumstances, it may bedesirable to use only metal electrodes, or metal electrodes incombination with polycrystalline silicon electrodes in the decouplingcapacitor. This may be desired in but not limited to applicationsrequiting significant simultaneous switching (100's to many thousand'sof circuits), high frequency (>1 GHz) and/or higher power/power density(40 watts/cm²) which if not adequately supported with decouplingcapacitors might fail to operate.

According to yet another exemplary embodiment of the present invention,as highlighted above and as illustrated in FIG. 2C, the decouplingcapacitors may be organized in “discrete decoupling blocks” within theinterposer structure. For example, in FIG. 2C, the two parallel platedecoupling capacitors are grouped into one discrete decoupling blockwithin the interposer structure, and the two trench decouplingcapacitors are grouped into a second discrete decoupling block withinthe interposer structure. Organizing the decoupling capacitors indiscrete blocks may be advantageous for some applications such asmultiple macro designs of different voltage on one chip or differentvoltages from multiple die on a carrier with integrated capacitance orto support chip to chip signal integrity across two or more die as itprovides a uniformity of coupling, and thus a uniformity of voltagetransfer, across each block of the interposer.

FIG. 3 is a diagram illustrating a cross-sectional view of exemplaryelectronic device 300 comprising multiple interposer structuresintegrated therein each having a plurality of capacitors Electronicdevice 300 comprises IC chip 302 and interposer structures 304 and 306.IC chip 302 is connected to interposer structure 304 by interconnections312, and interposer structure 304 is connected to interposer structure306 by interconnections 314 As with interconnections 104 and 112,described in conjunction with the description of FIG. 1, above,interconnections 312 and 314 may comprise any suitable electricallyconductive material, including, but not limited to, solder materials,such as lead-tin or tin-silver solder, copper and combinationscomprising at least one of the foregoing materials.

According to an exemplary embodiment, each of interconnections 312 and314 comprises copper. Copper is advantageous as it provides a permanentbond with high current carrying capacity and little or no electronmigration. As such, interposer density can be increased. Alternatively,one or more of interconnections 312 and 314 may comprise copper and theremainder of interconnections 312 and 314 comprise solder Copperinterconnection might be used for high current application, for singlechip to decoupling capacitor and solder for multiple chips to a carrier,decoupling capacitor or package Reason would be for lowest costdepending on assembly, chip, testing costs, reliability and yields.

Interposer structures 304 and 306 comprise multiple trench decouplingcapacitors 308 and silicon through vias 310. As was described, forexample, in conjunction with the description of FIGS. 2A-C, above,parallel plate decoupling capacitors may be used in place of, or inaddition to, trench decoupling capacitors within the interposerstructure Therefore, although not shown in FIG. 4, parallel platedecoupling capacitors may be employed in place of, or in addition to,one or more of trench decoupling capacitors 308.

Employing multiple interposer structures having integrated capacitors inan electronic device can provide for a greater amount of capacitance fora given unit area of space, e.g., as apposed to a single interposerstructure, while at the same time maintaining proper path lengths to theIC chips.

Another advantage of electronic device 300 is that it may be configuredto support multiple voltages. This can be done based on wiring griddesign within one layer or with use of multiple levels to providemultiple voltages to those circuits and components as needed from 1to >6 voltages as may be required for some IT chip applications. Withcurrent electronic devices, the ability to support multiple voltageapplications is important. Pot example, a plurality of processors may belocated on the same IC chip To operate these processors at multiplespeeds would require multiple voltages. The configuration andinterrelationship of interposer structures 304 and 306 allow for thesemultiple voltages applications based on capacitor design, wiring andinterconnection.

FIG. 4 is a diagram illustrating a cross-sectional view of exemplaryelectronic device 400 comprising an interposer structures having aplurality of capacitors and active circuits integrated therein.Electronic device 400 comprises IC chip 402 and interposer structure 404connected by interconnections 412. Interposer structure 404 comprises aplurality of trench decoupling capacitors 406 and silicon through vias408. The use of trench decoupling capacitors is merely exemplary and, asdescribed above, other suitable capacitors, such as parallel platedecoupling capacitors, may be employed in place of, or in addition to,trench decoupling capacitors 406.

Also included in interposer structure 404 awe a plurality of activecircuits 410. Placing one or more active circuits in the interposerstructure helps maximize available space in the electronic device.Further, the techniques for selectively eliminating one or moredefective capacitors, as will be described in detail below, may beemployed with regard to any of the embodiments described herein andfurther to selectively eliminate one or more of active circuits 410.

FIG. 5 is a diagram illustrating a cross-sectional view of exemplaryelectronic device 500 comprising an interposer structures having aplurality of capacitors integrated therein, as well as a plurality ofdiscrete capacitors associated therewith. Electronic device 500comprises IC chip 502 and interposer structure 504 connected byinterconnections 506. Interposer structure 504 comprises a plurality ofintegrated decoupling capacitors 508, including trench decouplingcapacitor and parallel plate decoupling capacitors, and silicon throughvias 510. Electronic device 500 further comprises one or more discretedecoupling capacitors 512 connected to interposer structure 504 byinterconnections 514. While the discrete decoupling capacitors shown aretrench decoupling capacitors, according to the techniques presentedherein, one or mole of the discrete decoupling capacitors may comprise aparallel plate decoupling capacitor.

Having one or more discrete decoupling capacitors associated with theinterposer structure may be advantageous to achieve a desired level ofcapacitance For example, when high k dielectric materials are used, itmay be advantageous to employ the high k dielectric materials in thediscrete decoupling capacitor instead of in the decoupling capacitorsintegrated in the interposer structure. In some cases, a high Kdielectric may be compatible with discrete capacitor fabrication but notpossible at reasonable cost for highly integrated capacitors. SomeBaTiO3 dielectrics with sizes where Coefficient of thermal expansionmakes the material not compatible for reliability reasons with standardsemiconductor process steps due to thermal cycling and potentialcracking or defects. However, the application needs may dictate need forsupplemental discrete capacitors.

FIG. 6A is a diagram illustrating a cross-sectional view of exemplaryelectronic device 600 comprising an interposer structure having aplurality of capacitors integrated therein, one or more of which isdefective. In FIG. 6A, electronic device 600, like electronic device100, described in conjunction with the description of FIG. 1, above,comprises IC chip 602 connected to interposer structure 603 by aplurality of interconnections 604. Interposer structure 603 comprises aplurality of trench decoupling capacitors 606 and silicon through vias610.

As shown in FIG. 6A, the second decoupling capacitor from the left isdefective. For example, as device dimensions decrease, an increasingnumber of defective capacitors will be produced, as even small errorsduring production can lead to non-functional capacitors. By way ofexample only, defects in the formation of one or mole of the plates ofthe capacitor can result in shorting. Instead of discarding the entireinterposer structure containing the one defective capacitor, thetechniques provided herein allow for the selective deactivation of oneor more individual capacitors in the interposer structure. According tothe teachings presented herein, the deactivation is “selective” as oneor more of the decoupling capacitors can be deactivated, withouteffecting the remaining capacitors.

In the exemplary embodiment shown in FIG. 6A, a passivation layer, e.g.,passivation layer 616, is formed over the defective capacitor toselectively deactivate the defective capacitor and without effecting theother decoupling capacitors in the interposer structure. As used herein,the term “passivation layer” refers generally to any layer that can beapplied to one or more surfaces of the capacitor and its associatedwiring that can effectively isolate, electrically, the capacitor fromthe interposer structure. For example, according to an exemplaryembodiment, passivation layer 616 comprises an organic polymer,including, but not limited to a polyimide, matromide or alternatepolymer and is deposited using conventional deposition techniques,including, but not limited to dispense and cure of the polymer films.The passivation may be on one contact such as 614 or both electricalconnections such as 614 and 616 where it is desired to completeelectrically isolate the defective or unneeded capacitor and woulddepend on design of the circuitry and application

FIG. 6B is a diagram illustrating a top-down view of exemplaryelectronic device 600 comprising an interposer structure having aplurality of capacitors integrated therein, one or more of which isdefective. Specifically, in FIG. 6B, IC chip 602 and passivation layers614 and 616 have been removed for clarity. As shown, interposerstructure 603 comprises a plurality of conductive points 620 which actas electrical conduits to, e.g., the decoupling capacitors and viasintegrated in interposer structure 603. Conductive points 620 aresurrounded by an insulating material 622. Suitable insulating materialsinclude, but are not limited to material examples, such as polyimidesand electrically insulating epoxies. According to the exemplaryembodiment shown in FIG. 6B, at least a portion, e.g., a top surface, ofinterposer structure 603 serves as a power plane of electronic device600. Therefore, conductive straps 618 can serve to connect, e.g., thedecoupling capacitors and vias, through conductive points 620 to thepower plane of electronic device 600.

To selectively deactivate one or more defective capacitors fromelectronic device 600, laser deletion techniques may be employed toremove the conductive straps associated with defective decouplingcapacitors and thus selectively disconnect those defective capacitorsfrom the other decoupling capacitors of the device. For example, FIG. 6Bshows that the conductive strap has been removed from the conductivepoint corresponding to the second decoupling capacitor from the left(see FIG. 6A).

FIG. 7 is a circuit diagram illustrating an exemplary electronic device700 comprising an interposer structure having a plurality of capacitorsintegrated therein Electronic device 700 comprises IC chip 702 andinterposer structure 704. Interposer structure 704 provides a connectionfor ground (GND), power (VDD) and signal. Decoupling capacitors, such asdecoupling capacitor 706, are associated with the GND and VDD circuits

FIG. 8 is a circuit diagram illustrating an exemplary electronic device800 comprising an interposer structure having a plurality of capacitorsintegrated therein which can be selectively deactivated. Electronicdevice 800 comprises IC chip 802 and interposer structure 804.Interposer structure 804 provides a connection for GND, VDD and signal.Decoupling capacitors, such as decoupling capacitor 806, are associatedwith the GND and VDD circuits. The decoupling capacitors are grouped,forming discrete blocks, as described above. Each grouping contains aGND, VDD, signal and, as will be described below, a fuse. A fuse bump isa bump that can be electrically opened to cause a non electricallyconducting path much the same as a fuse is used to limit current flowfrom too high current or otherwise creates an open in the circuit

Namely, a fuse is included in circuit with the VDD. If one or more ofthe decoupling capacitors for a given block of decoupling capacitors isdefective, that block can be selectively deactivated by intentionally“blowing” the fuse, e.g., by passing a current through the fusesufficient enough to open the circuit. As such, power to that block ofdefective decoupling capacitors will be eliminated. As will be describedbelow, conductive straps and fuses are examples of a number of removableconnections that are anticipated herein for selectively deactivating acapacitor(s).

FIG. 9 is a circuit diagram illustrating an exemplary electronic device900 comprising an interposer structure having a plurality of capacitorsintegrated therein which can be selectively deactivated Electronicdevice 900 comprises IC chip 902 and interposer structure 904.Interposer structure 904 provides a connection for GND, VDD and signal.Decoupling capacitors, such as decoupling capacitor 906, are associatedwith the GND and VDD circuits. The decoupling capacitors are grouped,forming discrete blocks, as described above. Each grouping contains aGND, VDD and a signal.

As described in conjunction with the description of FIG. 8, above, afuse is included in circuit with the VDD. However, the fuse, e.g., fuse908, is present on the IC chip side of the device. One or moreadditional removable connections, e.g., a removable contact bump, i.e.,labeled “Bump” in FIG. 9, may be employed in circuit with the VDD.

FIG. 10 is a circuit diagram illustrating an exemplary electronic device1000 comprising an interposer structure having a plurality of capacitorsintegrated therein which can be selectively eliminated. Electronicdevice 1000 comprises IC chip 1002 and interposer structure 1004.Interposer structure 1004 provides a connection for GND, VDD and signal.Decoupling capacitors, such as decoupling capacitor 1106, are associatedwith the GND and VDD circuits. The decoupling capacitors are grouped,forming discrete blocks, as described above. Each grouping contains aGND, VDD and a signal.

As described in conjunction with the description of FIG. 9, above, afuse is included in circuit with the VDD. However, the fuse, e.g., fuse1008, is present on the interposer structure side of the device Asdescribed above, if one or more of the decoupling capacitors for a givenblock of decoupling capacitors is defective, that block can beselectively removed, deactivated, by intentionally “blowing” the fuse,e.g., by passing a current through the fuse sufficient enough to openthe circuit. As such, power to that block of decoupling capacitors willbe eliminated.

In conclusion, the techniques presented herein allow for effectivedecoupling capacitance to be provided for electronic devices whereinfree space is at a premium, while at the same time maintaining properpath lengths to the components. Further, the techniques presented hereinaccommodate one or more defective components without sacrificing theentire device or entire portions of the device.

Although illustrative embodiments of the present invention have beendescribed herein, it is to be understood that the invention is notlimited to those precise embodiments, and that various other changes andmodifications may be made by one skilled in the art without departingfrom the scope or spirit of the invention

1. A method of fabricating an electronic device comprising at least oneinterposer structure having one or more vias and a plurality ofdecoupling capacitors integrated therein, the method comprising the stepof: selectively deactivating one or more of the plurality of decouplingcapacitors, wherein the step of selectively deactivating furthercomprises the step of placing a passivation layer over at least aportion of one or more of the plurality of decoupling capacitors.
 2. Themethod of claim 1, wherein the step of selectively deactivating hithercomprises the step of removing one or more removable connectionselectrically connecting one or more of the plurality of decouplingcapacitors to one or more other of the plurality of decouplingcapacitors
 3. The method of claim 2, wherein the removable connectionscomprise one or more of a conductive strap, a fuse and a removable bump.4. The method of claim 1, wherein the passivation layer comprises anorganic polymer.
 5. The method of claim 1, wherein the electronic devicefurther comprises an integrated circuit chip in electrical contact witha side of the at least one interposer structure.
 6. The method of claim5, wherein the electronic device further comprises one or more of aceramic substrate, organic substrate or Si substrate and a printedcircuit board in electrical contact with a side of the at least oneinterposer structure opposite the integrated circuit chip.
 7. The methodof claim 1, wherein the at least one interposer structure furthercomprises one or more active circuits integrated therein.
 8. The methodof claim 1, wherein the plurality of decoupling capacitors comprise oneor more of parallel plate decoupling capacitors and trench decouplingcapacitors.
 9. The method of claim 1, wherein the plurality ofdecoupling capacitors comprise at least one parallel plate decouplingcapacitor and at least one trench decoupling capacitor.
 10. The methodof claim 1, wherein the plurality of decoupling capacitors are groupedinto one or more blocks within the at least one interposer structure.11. The method of claim 1, wherein one or more of the plurality ofdecoupling capacitors comprise a high k dielectric material.
 12. Themethod of claim 11, wherein the high k dielectric material is selectedfrom the group consisting of silicon nitride, silicon oxinitride,tantalum oxide, titanium oxide, aluminum oxide, zirconium oxide, hafniumoxide, hafnium silicon oxide, barium strontium titanate, bariumzirconium titanate, barium titanium oxide, barium-strontium andcombinations comprising at least one of the foregoing materials.